According to the Shanghai Institute of Measurement and Measurement, recently, the Ministry of Science and Technology organized an expert group of technical experts and financial experts to evaluate the development of major national scientific instruments and equipment led by Shanghai Metrology and Engineering Equipment Supervision Co., Ltd. — — "Development and application of cross-scale micro/nanometers (2014YQ090709)" Conducted mid-term evaluation site inspections.
The “Development and Application of Cross-Scale Micro/Nanometers†was officially approved by the Ministry of Science and Technology in October 2014. Shanghai Measurement and Engineering Equipment Supervision Co., Ltd. took the lead, and Shanghai Measurement and Testing Technology Research Institute provided technical support. The total funding of 76.81 million yuan, of which the central government special funds to invest 37.31 million yuan, the deadline for the October 2018. By then, the project will form an annual output of 50 units of production capacity, with a total sales income of 50 million yuan.
The project is aimed at breaking through many technological bottlenecks in China's micro-nano detection technology integrated detection methods, overcoming key technologies such as macro-micro linkage multi-axis drive and multiple probe integration, nano-scale traceability based on atomic deposition grating, and other key technologies. Micro-nanometers for measuring micro-morphology and geometries in metrology, industrial production, and product testing, and building cross-scale, high-precision micro-nano measurement and R&D platforms for China’s defense, aerospace, semiconductor manufacturing, micro- The areas of prevention and control of atmospheric pollutants provide effective nano-metering technology support and protection, and upgrade the technological level of micro-nano size quantitative measurement in China's high-tech industries.
The results of the mid-term inspection showed that the development of the “Development and Application of Cross-Scale Micro/Nanometers†was in line with the requirements in the mission statement. The results have achieved 1 set of cross-scale micro/nanometers, 3 core key components, and new applications. Six methods; two sets of quality and reliability assurance solutions, and three sets of technical archives; and 32 papers published in the development process, 26 domestic patent applications (9 granted), and application and authorization of computer software copyrights 2 items, project funds use compliance.
After listening to the report of the research results, the assessment team also examined the prototype of the project's research and development and obtained unanimous approval.
The “Development and Application of Cross-Scale Micro/Nanometers†was officially approved by the Ministry of Science and Technology in October 2014. Shanghai Measurement and Engineering Equipment Supervision Co., Ltd. took the lead, and Shanghai Measurement and Testing Technology Research Institute provided technical support. The total funding of 76.81 million yuan, of which the central government special funds to invest 37.31 million yuan, the deadline for the October 2018. By then, the project will form an annual output of 50 units of production capacity, with a total sales income of 50 million yuan.
The project is aimed at breaking through many technological bottlenecks in China's micro-nano detection technology integrated detection methods, overcoming key technologies such as macro-micro linkage multi-axis drive and multiple probe integration, nano-scale traceability based on atomic deposition grating, and other key technologies. Micro-nanometers for measuring micro-morphology and geometries in metrology, industrial production, and product testing, and building cross-scale, high-precision micro-nano measurement and R&D platforms for China’s defense, aerospace, semiconductor manufacturing, micro- The areas of prevention and control of atmospheric pollutants provide effective nano-metering technology support and protection, and upgrade the technological level of micro-nano size quantitative measurement in China's high-tech industries.
The results of the mid-term inspection showed that the development of the “Development and Application of Cross-Scale Micro/Nanometers†was in line with the requirements in the mission statement. The results have achieved 1 set of cross-scale micro/nanometers, 3 core key components, and new applications. Six methods; two sets of quality and reliability assurance solutions, and three sets of technical archives; and 32 papers published in the development process, 26 domestic patent applications (9 granted), and application and authorization of computer software copyrights 2 items, project funds use compliance.
After listening to the report of the research results, the assessment team also examined the prototype of the project's research and development and obtained unanimous approval.