Key Techniques for High-precision Wide-spectrum Miller Matrix Ellipsometry

[ Instrument Network Instrument Development ] On April 13, 2019, the China Metrology and Testing Society organized experts to identify the scientific and technological achievements of the "High-precision broad-spectrum Miller matrix ellipsometry key technology and nano-measurement application" completed by Huazhong University of Science and Technology.

Academician Ye Shenghua of Tianjin University, Academician Jiang Zhuangde of Xi'an Jiaotong University, Academician of Tsinghua University, Professor Jia Zhenyuan of Dalian University of Technology, Researcher Gao Sitian of China Institute of Metrology, Professor Zhao Weiqian of Beijing Institute of Technology, Professor Yuan Weizheng of Northwestern Polytechnical University, Professor Zhu Limin of Shanghai Jiaotong University Professor Gu Bingfeng from Zhejiang University participated in the appraisal meeting as an appraisal committee.

The appraisal meeting was presided over by Academician Ye Shenghua. The appraisal committee heard the project work summary, technical research report, check the new situation and benefit situation made by the project team personnel; listened to the test situation of the test team leader report and the user's introduction. At the same time, an on-site inspection was conducted.

The project was completed by the team of Professor Liu Shiyuan from Huazhong University of Science and Technology and Wuhan Shuguang Technology Co., Ltd. The project proposes a series of new principles, invents new technologies, constructs new models, and develops China's first precision wide-spectrum Miller matrix ellipsometer, which realizes the transformation and industrialization of results, and forms a series of high-end ellipsometer products. After the appraisal meeting, all the review experts carefully reviewed and agreed that the results theoretically have important innovations and major breakthroughs in technology, and the overall technology has reached the international advanced level. Among them, the wide-spectrum super-achromatic polarization phase delay technology based on composite wave plate and the nano-structure calculation measurement method based on ellipsometry are the first in the world and are at the international advanced level.

This project has broken the monopoly of foreign companies on China's high-end ellipsometer market for a long time, and filled the gap in China's high-end ellipsometer field. Since the achievement of transformation and industrialization in 2013, the instrument has more than 100 academic institutions at home and abroad. Successful application has produced important domestic and international influences, which have great significance for China's advanced manufacturing industry.

(Original title: "High-precision wide-spectrum Miller matrix ellipsometry key technology and nano-measurement application" scientific and technological achievements appraisal successfully concluded)